scanning tunneling microscopy and nano-scale surface observation method using the same

摘要

PROBLEM TO BE SOLVED: To provide a scanning tunnel microscope using tunnel resistance, which allows high-sensitive and high-quantitative tunnel resistance measurement over the wide dynamic range; and a stable feedback control of a scanning tunnel microscope using tunnel resistance.;SOLUTION: A scanning tunnel microscope 1 comprises a sample stage 2 on which a sample 5 can be placed, a tunnel resistance R_t between the sample 5 and a probe 3 disposed apart from and opposite to the sample 5, a resonance circuit 10 including a matching resistance R_m parallelly connected to the tunnel resistance R_t, a directional coupler 12 connected to the resonance circuit 10, a high frequency input and output device 14 which transmits a high frequency signal to the resonance circuit 10 through the directional coupler 12, and a reflection measurement device 16 which receives a reflection signal from the resonance circuit 10 through the directional coupler 12.;COPYRIGHT: (C)2012,JPO&INPIT