Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition

摘要

A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I):; whereinM is a metal selected from Groups 3 through 12 of the Periodic Table;R¹ and R² are each independently H or C₁-C₆ alkyl; andR³ is H or C₁-C₈ alkyl.