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Self assembled semiconductor micro/nano structures on gaas substrate for monolithic integration of optoelectronic devices
Self assembled semiconductor micro/nano structures on gaas substrate for monolithic integration of optoelectronic devices
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机译:gaas基板上的自组装半导体微/纳米结构,用于光电器件的单片集成
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摘要
The present invention relates to the fabrication of semiconductor micro/nanostructures by using strain-driven self assembling technique. The semiconductor Micro/ Nano structures have monolithic integration for micro electro mechanical system (MEMS) and optoelectronics devices. This will lead to the monolithic integration of the devices for future optical communication system on GaAs substrates.
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