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METHOD FOR PRODUCING A COMPOSITE BODY HAVING A SINTERED JOINING LAYER AND SINTERING DEVICE FOR PRODUCING SUCH A COMPOSITE BODY
METHOD FOR PRODUCING A COMPOSITE BODY HAVING A SINTERED JOINING LAYER AND SINTERING DEVICE FOR PRODUCING SUCH A COMPOSITE BODY
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机译:具有烧结接合层的复合体的制造方法以及用于制造这种复合体的烧结装置
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摘要
The invention relates to a method for producing a composite body (10), in particular a composite body (10) for constructing an electronic component, which, in a completed state, comprises at least two partial bodies (12, 14) that are firmly bonded to each other, wherein the firm bond is produced by at least one joining layer (18) that is arranged in a joining direction (16) between the partial bodies (12, 14) and formed from a sintered material, characterized by the following steps: a) creating an assembly of the at least two partial bodies (12, 14) and the at least one unsintered joining layer (18) arranged in the joining direction (16) between the at least two partial bodies (12, 14) into an assembled composite body (10); b) placing the assembled composite body (10) in a first partial chamber (36) of a sintering chamber (22) that can be sealed substantially gas-tight, has chamber walls (26), and has a substantially gas-impermeable chamber divider (32) that divides the sintering chamber (22) into the first partial chamber (36) and at least one second partial chamber (38) in the direct vicinity of the chamber divider (32), wherein the chamber divider (32) has at least one deformable partial element (34) having a position that is modifiable relative to the chamber walls (26); c) producing a positive chamber pressure difference between the second partial chamber (38) and the first partial chamber (36); and d) heating the arranged composite body (10) at least to a temperature predetermined as a sintering temperature. The invention further relates to a sintering device for producing such a composite body (10).
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