首页> 外国专利> METHOD FOR PRODUCING A COMPOSITE BODY HAVING A SINTERED JOINING LAYER AND SINTERING DEVICE FOR PRODUCING SUCH A COMPOSITE BODY

METHOD FOR PRODUCING A COMPOSITE BODY HAVING A SINTERED JOINING LAYER AND SINTERING DEVICE FOR PRODUCING SUCH A COMPOSITE BODY

机译:具有烧结接合层的复合体的制造方法以及用于制造这种复合体的烧结装置

摘要

The invention relates to a method for producing a composite body (10), in particular a composite body (10) for constructing an electronic component, which, in a completed state, comprises at least two partial bodies (12, 14) that are firmly bonded to each other, wherein the firm bond is produced by at least one joining layer (18) that is arranged in a joining direction (16) between the partial bodies (12, 14) and formed from a sintered material, characterized by the following steps: a) creating an assembly of the at least two partial bodies (12, 14) and the at least one unsintered joining layer (18) arranged in the joining direction (16) between the at least two partial bodies (12, 14) into an assembled composite body (10); b) placing the assembled composite body (10) in a first partial chamber (36) of a sintering chamber (22) that can be sealed substantially gas-tight, has chamber walls (26), and has a substantially gas-impermeable chamber divider (32) that divides the sintering chamber (22) into the first partial chamber (36) and at least one second partial chamber (38) in the direct vicinity of the chamber divider (32), wherein the chamber divider (32) has at least one deformable partial element (34) having a position that is modifiable relative to the chamber walls (26); c) producing a positive chamber pressure difference between the second partial chamber (38) and the first partial chamber (36); and d) heating the arranged composite body (10) at least to a temperature predetermined as a sintering temperature. The invention further relates to a sintering device for producing such a composite body (10).
机译:本发明涉及一种用于制造复合体(10)的方法,特别是一种用于制造电子部件的复合体(10)的方法,该复合体在完成状态下包括至少两个牢固地固定的分体(12、14)。彼此粘结,其中所述牢固粘结是由至少一个沿烧结方向(16)布置在分体(12、14)之间并由烧结材料形成的粘结层(18)产生的,其特征在于:步骤:a)形成至少两个分体(12、14)和在接合方向(16)上布置在至少两个分体(12、14)之间的至少一个未烧结的接合层(18)的组件。制成组装好的复合体(10); b)将组装的复合体(10)放置在烧结室(22)的第一部分室(36)中,该烧结室(22)可以是基本上气密的,具有室壁(26),并且具有基本上不透气的室分隔器(32)将烧结腔室(22)分成第一部分腔室(36)和在腔室隔板(32)的直接附近的至少一个第二部分腔室(38),其中腔室隔板(32)具有至少一个可变形的局部元件(34),其相对于腔室壁(26)的位置可改变; c)在第二部分腔室38和第一部分腔室36之间产生正的腔室压力差; d)将布置的复合体(10)至少加热到预定为烧结温度的温度。本发明还涉及一种用于制造这种复合体(10)的烧结装置。

著录项

  • 公开/公告号EP2801106A1

    专利类型

  • 公开/公告日2014-11-12

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号EP20120816024

  • 发明设计人 GUYENOT MICHAEL;

    申请日2012-12-11

  • 分类号H01L21/60;B30B5/02;

  • 国家 EP

  • 入库时间 2022-08-21 15:05:06

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