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Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic EL element including the diffraction grating
Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic EL element including the diffraction grating
A method for producing a mold includes: applying a block copolymer solution made of first and second polymers on a base member; performing a first annealing process at a temperature higher than Tg of the block copolymer after drying the coating film; forming a concavity and convexity structure on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure at a temperature higher than Tg of the first polymer; forming a seed layer on the structure; laminating or stacking a metal layer on the seed layer by an electroforming; and peeling off the metal layer from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure on the base member onto the metal layer.
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