METAL DEPOSITION SOURCE ASSEMBLY AND METAL DEPOSITION APPARATUS INCLUDING SAME

摘要

The present invention relates to a metal evaporation source assembly for depositing a metal thin film on a substrate. The metal deposition source assembly comprises: a housing; a crucible provided in the housing to receive a deposition material; a heater installed between the housing and the crucible to heat the crucible; a nozzle provided in an upper part of the housing to guide a path through which an evaporated deposition material is sprayed toward the substrate; and a bead layer disposed on the deposition material and including a plurality of beads to pass the deposition material through the beads. Therefore, the metal evaporation source assembly can prevent a phenomenon that a liquid deposition material bounds toward the substrate or the nozzle.;COPYRIGHT KIPO 2017