METHOD FOR INDUCING AND EXCITING RADIO FREQUENCY PLASMA WITH LASER IN LOW AIR PRESSURE ENVIRONMENT

摘要

A method for inducing and exciting a radio frequency plasma with laser in a low air pressure environment. In the method, hardware comprises a pulse laser light source (1), a convex lens (3), a target material (5), an ion source system (6) and a radio frequency power supply system (8). The contents of the method comprise: when an air pressure value of gas in the ion source system is lower than 1 Pa and it is difficult to generate a radio frequency plasma, bombarding the target material in the ion source system with a pulse laser beam, so as to improve the density of seed charges inside the ion source, thereby inducing a radio frequency plasma; firstly, after the ion source system has a relatively high vacuum degree, providing gas needed to generate a plasma for the ion source system, providing a radio frequency electromagnetic field for an internal environment of the ion source system, outputting a high-strength laser pulse and forming a high-power density light spot after focusing to hit the surface of the target material; and at the moment when the pulse laser light spot arrives at the surface of the target material, generating a laser plasma on the surface of the target material and providing seed charges for the inside of the ion source system, and the radio frequency plasma inside the ion source system being induced.