Wavelength variable interference filter, electronic device, wavelength variable interference filter design method, wavelength variable interference filter manufacturing method

摘要

A wavelength variable interference filter includes a fixed reflection film, a movable reflection film, and an actuator that changes a gap between the films. A wavelength of output light is first wavelength λα. A center wavelength in a target wavelength region is measurement center wavelength λ0. A peak center wavelength in reflection characteristics of the movable reflection film is first center wavelength λ1. A peak center wavelength in reflection characteristics of the fixed reflection film is second center wavelength λ2. The gap between the films when light of the first wavelength λα is transmitted is dα(λ1 , λ2). When a pair of optical films face each other, a center wavelength in reflection characteristics of the pair is the measurement center wavelength λ0, and the light of the first wavelength λα is outputted, the gap between the pair of optical films is dα(λ0, λ0). Further, dα(λ1, λ2)dα(λ0, λ0).