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Nozzle for dispensing assembly of material deposition source configuration, material deposition source configuration, vacuum deposition system, and method for depositing material
Nozzle for dispensing assembly of material deposition source configuration, material deposition source configuration, vacuum deposition system, and method for depositing material
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机译:用于分配材料沉积源构造的喷嘴,材料沉积源构造,真空沉积系统以及沉积材料的方法
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摘要
A nozzle for being connected to a distribution assembly for guiding evaporated material from a material source into a vacuum chamber is described. The nozzle includes: a nozzle inlet for receiving the evaporated material; a nozzle outlet for releasing the evaporated material to the vacuum chamber; and a nozzle passage extending from the nozzle inlet the nozzle outlet in a flow direction, wherein the nozzle passage comprises an outlet section having an aperture angle which continuously increases in the flow direction. Further, a material deposition arrangement having such a nozzle, a vacuum deposition system with the material source arrangement, and a method for depositing evaporated material are provided.
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