DELIVERY DEVICE, SUBSTRATE ION-IMPLANTING SYSTEM AND METHOD THEREOF

摘要

The present disclosure relates to a delivery device, a substrate ion-implanting system and a substrate ion-implanting method. The substrate ion-implanting system includes: a substrate-supporting table and an ion-implantation device connected to the substrate-supporting table. A substrate is movable from the substrate-supporting table into the ion-implantation device. The ion-implantation device includes an operation chamber, and the substrate is transferred to the operation chamber for implanting ions by the ion-implantation device. A transfer chamber is configured to transfer back the substrate after implanting the ions to the substrate-supporting table. By the above means, the present disclosure can improve the productivity of the substrate ion-implanting system.