Metal-Sensing Layer-Semiconductor and Metal-Sensing Layer-Metal Heterostructure Gas Sensors.

摘要

Extremely sensitive gas sensors can be fabricated using heterostructures of the form metal-sensing layer-semiconductor or metal-sensing layer-metal. These structures are heterostructure diodes which have the barrier controlling transport at least partially located in the sensing layer. In the presence of the gas species to be detected, the electrical properties of the sensing layer evolve, resulting in a modification of the barrier to electric current transport and, hence, resulting in detection due to changes in the current-voltage characteristics of the device. This type of sensor structure is demonstrated using the Pd/Ti-O/sub x/Ti heterostructure hydrogen detector. (ERA citation 12:046125)