High-Speed, Sub-Pull-in Voltage MEMS Switching.

摘要

We have proposed and demonstrated MEMS switching devices that take advantage of the dynamic behavior of the MEMS devices to provide lower voltage actuation and higher switching speeds. We have explored the theory behind these switching techniques and have demonstrated these techniques in a range of devices including MEMS micromirror devices and in-plane parallel plate MEMS switches. In both devices we have demonstrated switching speeds under one microsecond which has essentially been a firm limit in MEMS switching. We also developed low-loss silicon waveguide technology and the ability to incorporate high-permittivity dielectric materials with MEMS. The successful development of these technologies have generated a number of new projects and have increased both the MEMS switching and optics capabilities of Sandia National Laboratories.