Atomic Layer Deposition of Metal Oxides on sp2-Graphitic Carbon Substrates.

摘要

This research concentrated on the growth and characterization of metal oxide ALD films on sp2-graphitic carbon substrates. Metal oxide ALD films on sp2-graphitic carbon were also evaluated for their ability to serve as electrodes for Li ion batteries and for pseudocapacitance supercapacitors. The research explored the ALD nucleation procedure based on NO2 and TMA. Al2O3 ALD films resulting from the nucleation procedure were analyzed using electrochemical methods with cyclic voltammetry and electrochemical impedance spectroscopy (EIS). Other metal oxide ALD films such as TiO2 and ZnO were used for electrodes for Li ion batteries and pseudocapacitance supercapacitors.