We show the success of large-scale growth of ZnO hexagonal nanoprisms on silicon substrates by a two-staged mechanism. In the first stage, the catalyst nanoparticles assisted the nucleation via the vapour-liquid-solid (VLS) mechanism to form polyhedral nanoparticles. In the second stage, the nanoprism was grown up by anisotropic homoepitaxy, layer by layer, on the c-face of the polyhedral nanoparticle. The surface of the nanoprism consists of the ultraflat {0001} and {1010} planes. The nanoprism is 200-500 nm in width and controllably sized in length, of high crystalline quality and excellent optical quality. This nanoprism would be an interesting building block for highly efficient nanolasers.
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