机译:STEM-EELS分析揭示了磁控溅射沉积的非晶硅涂层纳米孔中稳定的高密度氦
Univ Seville, CSIC, Inst Ciencia Mat Sevilla, E-41092 Seville, Spain;
Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Electron, D-52425 Julich, Germany;
spatially resolved EELS; spectrum imaging; magnetron sputtering; amorphous porous silicon coatings; closed nanopores; condensed He bubbles; reduced refractive index;
机译:Properties of TiAlCN/VCN Nanoscale Multilayer Coatings Deposited by Mixed High-Power Impulse Magnetron Sputtering (HiPIMS) and Unbalanced Magnetron Sputtering Processes - Impact of HiPIMS During Coating
机译:Structure and mechanical properties of Ni and Cr binary doped amorphous carbon coatings deposited by magnetron sputtering and pulse cathodic arc
机译:Nitrided Amorphous Stainless Steel Coatings Deposited by Reactive Magnetron Sputtering from an Austenitic Stainless Steel Target
机译:Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor