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机译:
Univ Tennessee, Knoxville, TN 37996 USA;
Intel Corp, Santa Clara, CA 95054 USA;
IBIP; sputtering; neon sputtering; ion Monte Carlo; dry etching; helium; neon;
机译:Monte Carlo simulation for the sputtering yield of Si3N4 thin film milled by focused ion beams
机译:Impact of strong quantum confinement on the performance of a highly asymmetric device structure: Monte Carlo particle-based simulation of a focused-ion-beam MOSFET
机译:Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations