An innovative, simple design for a computerhyphen;controlled, threehyphen;dimensional plasma probe drive system

摘要

A simple design for a fully computerhyphen;controlled, threehyphen;dimensionally movable probe position system is described. Particular attention is given to the constraints of a plasma environment. A novel spring joint eliminates the need for ball bearings, universal joints, telescoping parts, etc., and thus avoids the potential risk of cold welding. The new probe drive is external to the plasma device, userhyphen;friendly and robust, and it provides for high spatial resolution. The computer control system is flexible with respect to computing platform and application development environment.