Preparation of largehyphen;area monocrystalline silicon thin windows

摘要

A procedure suitable for laboratory practice is described to prepare largehyphen;area selfhyphen;supporting silicon thin crystals with (100), (110) and (111) orientations. Windows up to 2 cm in diameter and 2000 Aring; in thickness can be produced. Variation in the thickness across the sample can be as low as plusmn;60 Aring; as measured by4He+backscattering spectrometry.