A new style of sputterhyphen;ion Penning discharge pump has been designed, built and tested using helium and hydrogen as background gases. This pump has been shown to operate reliably and stably in the magnetic field extremes of 0.5 and 51 kG. Anode potential must exceed 2000 V and still higher potentials assure the ability to efficiently pump noble gases. At 51 kG, the current/pressure ratio for this test pump with sim;1.2 cm3of total cell volume ranges from 500 to 100 A/Torr for a pressure range of approximately 2times;10minus;7to 4times;10minus;11Torr (uncorrected) respectively.
展开▼
