A liquid metal ion source producing Si and Sb ions on the basis of an AuSiSb alloy has been investigated. Intensive lines of Si2+and Sb2+ions, which are particularly suitable for use in focused ion beam systems, have been identified in the ion beam mass spectrum. The energy distributions of the main peaks in the mass spectrum, Si+, Si2+, Sb+, Sb2+, Au+and Au2+, have been investigated at temperatures of 500 degrees C, 600 degrees C and 700 degrees C. The full width at half maximum of the energy distribution is evaluated to be between 10 and 16 eV.
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