Interaction ofIMG/IMGmolecules with silicon surfaces and the formation of SiC films

摘要

We report on the results of an investigation of the interaction of submonolayers, monolayers, and multilayers ofmolecules with Si(111) and Si(100) surfaces at a variety of temperatures. The results shed light on the mechanism of the formation of SiC films from the decomposition ofmolecules at elevated temperatures, and the interaction of the released carbon atoms with the silicon substrate.