An improved detection system for electrical microcharacterization in a scanning electron microscope

摘要

SUMMARYAn improved, modular detection system for conductive mode, charge collection (CC) microscopy and electrical microcharacterization in a scanning electron microscope is reported. It makes possible the recording of both the short‐circuit current (EBIC) and the open‐circuit voltage (EBIV) generated by the barrier or the bulk electron voltaic effect even in the presence of biases up to 700 V. The constant‐current β‐conductivity voltage signal and the constant‐voltage β‐conductivity current signal can also both be recorded.The design of the system emphasizes noise minimization, a wide range of operating characteristics all independently controllable, quantitative monitoring and simple signal processing. An interface to a microcomputer is provided for more detailed quantitative analyses of the signals. The system has been calibrated so the accuracy of the measurements is known.The potential of this detection system is illustrated by means of a number of