Integrated automatic modular measuring system

摘要

This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both standhyphen;alone and remote modes and are interconnected using an IEEEhyphen;488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.