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机译:Van der Waals Layer Transfer of 2D Materials for Monolithic 3D Electronic System Integration: Review and Outlook
Institute of Materials Research and Engineering;
two-dimensional materials; transition metal dichalcogenides; monolithic three-dimensional integration; van der Waals layer transfer; wafer-scale and high-yield layer transfer; metal-assisted layer transfer; two-dimensional material template-assisted van der Waals transfer; multifunctional three-dimensional integrated electronics;