Precision open-loop control of piezoelectric actuator

摘要

Due to space constraints, some micro-assemblies and micro-operating systems cannot install sensors, so it is challenging to achieve closed-loop control. For this reason, a precision open-loop control strategy for piezoelectric actuators is proposed. Firstly, based on the PI model and the proposed threshold partition method, the hysteresis model of the piezoelectric actuator with rate-dependent and few operators is established. Then the hysteresis error of the piezoelectric actuator is compensated by the inverse model obtained. Secondly, the creep model of the logarithmic piezoelectric actuator with simple expression and few parameters is established. Then, a creep controller without demand inverse is designed to compensate for the creep error of the piezoelectric actuator. Finally, a ZVD (Zero Vibration Derivative) input shaping method with good robustness is given to eliminate the oscillation generated by the piezoelectric actuator under the action of the step signal. The experimental results show that the displacement error of piezoelectric actuator is reduced from ?9.07 to 9.46?μm to ?1.22 to 1.78?μm when the maximum displacement is 120?μm after hysteresis compensation; after creeping compensation, within the action time of the 1200?s, the displacement creep of the piezoelectric actuator was reduced from 5.5?μm before compensation to 0.3?μm; after the oscillation control, the displacement overshoot of the piezoelectric actuator is reduced to 0.6 of that before control.