Nonlinear Finite Element Calculations of Layered SAW Resonators

摘要

In this work the nonlinear behavior of layered surface acoustic wave (SAW) resonators is studied with the help of finite element (FE) computations. The full calculations depend strongly on the availability of accurate tensor data. While there are accurate material data for linear computations, the complete sets of higher-order material constants, needed for nonlinear simulations, are still not available for relevant materials. To overcome this problem, scaling factors were used for each available nonlinear tensor. The approach here considers piezoelectricity, dielectricity, electrostriction, and elasticity constants up to the fourth order. These factors act as a phenomenological estimate for incomplete tensor data. Since no set of fourth-order material constants for LiTaO3 is available, an isotropic approximation for the fourth-order elastic constants was applied. As a result, it was found that the fourth-order elastic tensor is dominated by one-fourth order Lamé constant. With the help of the FE model, derived in two different, but equivalent ways, we investigate the nonlinear behavior of a SAW resonator with a layered material stack. The focus was set to third-order nonlinearity. Accordingly, the modeling approach is validated using measurements of third-order effects in test resonators. In addition, the acoustic field distribution is analyzed.