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机译:A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing
Department of Microelectronics, Electronic Instrumentation Laboratory, Delft University of Technology, Delft, CD, The Netherlands;
Department of Electrical Engineering, Tsinghua University, Beijing, China;
Integrated Devices and Systems Group, University of Twente, Enschede, NB, The Netherlands;
Sensors; Microelectromechanical devices; Microfluidics; Readout electronics; Delta-sigma modulation;