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机译:Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy
Harbin Inst Technol, Minist Educ, Dept Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China;
Xiamen Univ, State Key Lab Phys Chem Solid Surfaces PCOSS, Collaborat Innovat Ctr Chem Energy Mat iChEM, Engn Res Ctr Electrochem Technol,Minist Educ, Xiamen 361005, Peoples R China;
electrochemical nanomachining; nanopatterning; SECM; semiconductors;