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机译:Pillar-structured 3D inlets fabricated by dose-modulated e-beam lithography and nanoimprinting for DNA analysis in passive, clogging-free, nanofluidic devices
Univ Hamburg;
3D inlets; dose modulated electron beam lithography; nanopillars; nanoimprinting; passive nanofluidic device; DNA in nanochannel; clogging-free molecular flow; CHIP DEVICES; MOLECULE; MICROFLUIDICS; PERFORMANCE; SEQUENCE; ARRAYS;