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机译:ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining
Tokyo Inst Technol, Dept Mat Sci & Engn, Tokyo, Japan;
Ecole Polytech Fed Lausanne EPFL, Galatea Lab, IMT STI, Neuchatel, Switzerland;
femtosecond laser processing; IR spectroscopy; leaching; silica glass; surface modification;