Binary-optic smoothing with isotropic etching

摘要

Binary optics are an important part of modern optics, but they have some inherent problems because of their binary nature. The optics cannot achieve maximum efficiency unless the rms surface error can be reduced. A technique for smoothing jagged surfaces by use of isotropic etching is presented. We show that etching smoothes the binary nature and improves the optical efficiency. #1997 Optical Society of America