Axicon-type test interferometer for cylindrical surfaces: systematic error assessment

摘要

The principle and the alignment aberration functions are described for an axicon-type test interferometer for measuring cylindrical mantle surfaces. Additionally, we show that the derived systematic alignment functions fulfill for reasonably small misalignments the requirements for measurements in the range of approximately 1/100 of a fringe. We verify this with optical path-length calculations, using ray tracing. # 1997 Optical Society of America