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Role of defects and grain boundaries in the thermal response of wafer-scale hBN films

机译:缺陷和晶界在晶圆级HBN薄膜热响应中的作用

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摘要

With more widespread applications of nanotechnology, heat dissipation in nanoscale devices is becoming a critical issue. We study the thermal response of wafer-scale hexagonal boron nitride (hBN) layers, which find potential applications as ideal substrates in two dimensional devices. Sapphire-supported thin hBN films, 2 '' in size and of different thicknesses, were grown using metalorganic vapour phase epitaxy. These large-scale films exhibit wrinkles defects and grain boundaries over their entire area. The shift of E-2g(high) phonon mode with temperature is analysed by considering the cumulative contribution of anharmonic phonon decay along with lattice thermal expansion, defect, and strain modulation. The study demonstrates that during heat treatment the strain evolution plays a dominating role in governing the characteristics of the wrinkled thinner films. Interestingly we find that both defects and strain determine the spectral line-width of these wafer-scale films. To the end, from Raman line-width, the changes in phonon lifetime in delaminated and as-grown films is estimated. The results suggest the possibility of a reduction in thermal transport in these wafer-scale films compared to their bulk counterpart.
机译:随着纳米技术的广泛应用,纳米器件的散热成为一个关键问题。我们研究了晶圆级六角氮化硼(hBN)层的热响应,发现其作为二维器件的理想衬底具有潜在的应用前景。使用金属有机气相外延法生长了尺寸为2''且厚度不同的蓝宝石支撑的hBN薄膜。这些大尺寸薄膜在其整个区域上显示褶皱、缺陷和晶界。通过考虑非简谐声子衰变以及晶格热膨胀、缺陷和应变调制的累积贡献,分析了E-2g(高)声子模随温度的移动。研究表明,在热处理过程中,应变演化对控制起皱薄膜的特性起主导作用。有趣的是,我们发现缺陷和应变都决定了这些晶圆级薄膜的谱线宽度。最后,根据拉曼谱线宽度,估算了分层薄膜和生长薄膜中声子寿命的变化。结果表明,与大块薄膜相比,这些晶圆级薄膜的热传输可能会降低。

著录项

  • 来源
    《Nanotechnology》 |2021年第7期|共9页
  • 作者单位

    Indian Inst Technol Kharagpur Sch Nano Sci &

    Technol Kharagpur 721302 W Bengal India;

    Indian Inst Technol Dept Phys Kharagpur 721302 W Bengal India;

    Australian Natl Univ Res Sch Phys Dept Elect Mat Engn Canberra ACT 2601 Australia;

    Australian Natl Univ Res Sch Phys Dept Elect Mat Engn Canberra ACT 2601 Australia;

    Australian Natl Univ Res Sch Phys Dept Elect Mat Engn Canberra ACT 2601 Australia;

    Australian Natl Univ Res Sch Phys Dept Elect Mat Engn Canberra ACT 2601 Australia;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 特种结构材料;
  • 关键词

    hexagonal boron nitride; Raman scattering; thermal response;

    机译:六方氮化硼;拉曼散射;热响应;

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