Characterization of a chromatic confocal displacement sensor integrated with an optical laser head

摘要

In this paper, the results of experimental characterization of an optical system consisting of a chromatic confocal displacement sensor integrated with an optical laser head are presented. As a result of integration, the part of the optical path of the displacement sensor was combined with the optical path of the laser beam. Consequently, a working distance of 250 mm for the optical system was achieved. The main aim of the characterization was to determine the calibration curve, as well as the application parameters of the system. The methodology for spectral data processing with particular emphasis on the effectiveness of various extraction algorithms is presented. The Lorentzian fitting was considered as the optimal algorithm for the optical system. Consequently, a large measuring range of 10 mm was obtained with perfect linear tendency of the calibration curve. The optical system was characterized by high accuracy equal to +/- 0.11% of the measuring range, as well as 1 mu m resolution. Moreover, the functionality of the system was verified on materials commonly used in laser processing and additive manufacturing. Finally, the system was validated through a comparative measurement with a laser profiler. (C) 2021 Optical Society of America