Two-dimensional vibration actuated polishing of small surfaces by generating random-like Lissajous trajectories

摘要

Small-surface optical components with complex shapes and high-precision requirements are increasingly needed in the fields of mobile communications, in vivo diagnosis, and other fields. Some scholars have studied and proposed a two-dimensional vibration actuated polishing (2D-VAP) method based on small polishing tools for the preparation of small-surface optical elements. Using the nonresonant 2D-VAP device developed by the author, the frequency and amplitude of 2D-VAP are precisely adjusted to generate a random-like Lissajous polishing trajectory, which can overcome the problem that most of the existing 2D-YAP methods generate a circular or elliptical polishing trajectory at the small polishing tool, resulting in leaving periodic polishing marks on the workpiece surface. The removal function model under the condition of random-like Lissajous polishing motion with a small polishing tool is established. In addition, the removal function verification experiments and surface polishing experiments are carried out. The experimental results show that the measured removal function is in good agreement with that obtained by numerical simulation. Compared with the circular polishing trajectory, the random-like Lissajous polishing trajectory can significantly improve the material removal rate, and there are no obvious periodic polishing marks on the workpiece surface. (C) 2021 Optical Society of America