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Low-cost fabrication of microlasers based on polymeric micropedestals

机译:基于聚合物微孔的微溶剂的低成本制造

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摘要

Our current work exploits direct laser writing (DLW) and low one-photon absorption (LOPA) in a low-cost three-dimensional optical fabrication system designed to print micrometric polymeric structures. Micropedestals were obtained by focusing a laser beam on a photoresist layer deposited on a silica glass substrate. Subsequent coating with rhodamine 6G dye allows these pedestals to function as microlasers upon optical excitation at 532 nm. Our microlasers, with a diameter of similar to 53 mu m and a height of similar to 40 mu m, exhibit a broad fluorescence peak in the spectral range 540-600 nm, in addition to narrow lasing peaks, exhibiting quality factors Q exceeding 2000 and a lasing threshold of similar to 5 mu Jcm(-2). The observed free spectral range associated with the lasing peaks of similar to 3 nm is consistent with simulations, which we include in this paper. In addition, we present simulations for the longitudinal shift of the patterning laser spot, which occurs particularly for relatively thick photoresist layers, coupled with a large index contrast at the photoresist top surface. Such a shift could introduce errors in the resulting microfabricated structures if left unaccounted for. We hope that our work will contribute to the development of microlasers for various photonic applications, particularly if dimensions can be reduced, for on-chip optical communications and data processing. (C) 2021 Optical Society of America
机译:我们目前的工作利用直接激光写入(DLW)和低单光子吸收(LOPA)在一个低成本的三维光学制造系统中进行,该系统设计用于打印微型聚合物结构。通过将激光束聚焦在硅玻璃衬底上沉积的光刻胶层上,获得了微基座。随后,罗丹明6G染料涂层使这些基座在532 nm光激发下起到微激光器的作用。我们的微激光器直径约为53μm,高度约为40μm,在540-600 nm的光谱范围内显示出较宽的荧光峰,此外还有较窄的激光峰,质量因子Q超过2000,激光阈值约为5μJcm(-2)。观察到的与类似于3nm的激光峰值相关的自由光谱范围与我们在本文中包括的模拟结果一致。此外,我们还对图案化激光光斑的纵向移动进行了模拟,这种移动尤其发生在相对较厚的光刻胶层上,并且在光刻胶顶面上有较大的折射率对比度。如果不加以解释,这种转变可能会在最终的微加工结构中引入错误。我们希望,我们的工作将有助于开发各种光子应用的微激光器,特别是在可以降低尺寸的情况下,用于片上光通信和数据处理。(2021)美国光学学会

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  • 来源
    《Applied optics》 |2021年第3期|共7页
  • 作者单位

    Univ Guanajuato Div Ciencias &

    Ingn Dept Ingn Fis Cuerpo Acad Mecan Estadist Leon Gto Mexico;

    Univ Nacl Autonoma Mexico Inst Ciencias Nucl Apdo Postal 70-543 Mexico City 04510 DF Mexico;

    Univ Guanajuato Div Ciencias &

    Ingn Dept Ingn Fis Cuerpo Acad Mecan Estadist Leon Gto Mexico;

    Tecnol Monterrey Escuela Ingn &

    Ciencias Campus Leon Edificio CCI 2nd Piso Guanajuato Mexico;

    Univ Guanajuato Div Ciencias &

    Ingn Dept Ingn Fis Cuerpo Acad Mecan Estadist Leon Gto Mexico;

    Univ Nacl Autonoma Mexico Inst Ciencias Nucl Apdo Postal 70-543 Mexico City 04510 DF Mexico;

    Univ Guanajuato Div Ciencias &

    Ingn Dept Ingn Fis Cuerpo Acad Mecan Estadist Leon Gto Mexico;

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  • 正文语种 eng
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