Surface Functionalized Sensors for Humidity-Independent Gas Detection

摘要

Semiconducting metal oxides (SMOXs) are used widely for gas sensors. However, the effect of ambient humidity on the baseline and sensitivity of the chemiresistors is still a largely unsolved problem, reducing sensor accuracy and causing complications for sensor calibrations. Presented here is a general strategy to overcome water-sensitivity issues by coating SMOXs with a hydrophobic polymer separated by a metal-organic framework (MOF) layer that preserves the SMOX surface and serves a gas-selective function. Sensor devices using these nanoparticles display near-constant responses even when humidity is varied across a wide range [0-90 % relative humidity (RH)]. Furthermore, the sensor delivers notable performance below 20 % RH whereas other water-resistance strategies typically fail. Selectivity enhancement and humidity-independent sensitivity are concomitantly achieved using this approach. The reported tandem coating strategy is expected to be relevant for a wide range of SMOXs, leading to a new generation of gas sensors with excellent humidity-resistant performance.