Wavefront aberration metrology based on transmitted fringe deflectometry

摘要

A simple, precise, and innovative technique for wavefront aberration measurement is presented in this paper. This technique is based on transmitted fringe deflectometry (TFD) used to measure wavefront slope and wavefronts. The system measurement error when measuring wavefront aberration is analyzed, including the aberration of the reference wavefront caused by shape distribution and the tilt and decentration of the phase object. Based on this, the system error model is established, and the system error compensation method is also presented. In addition, the system parameters calibration method is discussed in detail. Simulation and experimental results show that the proposed TFD wavefront aberration measurement model can achieve high measurement accuracy. (C) 2017 Optical Society of America