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Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers

机译:关于相干扫描干涉仪的建议线性理论的考虑因素

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摘要

It was suggested in [Appl. Opt. 52, 3662 (2013)] that the result of a measurement via coherence scanning interferometry could be viewed as the convolution of a point spread function of the instrument and an open surface in 3D space that lies at the air/material interface over a portion of the object's surface. Further, it was suggested that by measuring certain objects, such as ones that are very close to spherical, and whose surface is known to a sufficient level of accuracy, that a point spread function for the instrument could be determined from the measurement result. We conclude that the approximations used in this calculation do not give sufficient accuracy to allow this to be achieved, and that the truncation of the surface function from the closed surface surrounding the object is not defined sufficiently well in order to give a unique solution to the problem. The physical justification for the truncation of the surface in this manner is also questioned.
机译:它建议在[苹果。 选择。 52,3662(2013)]通过相干扫描干涉测量的测量结果可以被视为仪器点扩散功能的卷积和3D空间中的开放表面,位于空气/材料界面上的一部分 物体的表面。 此外,建议通过测量某些物体,例如非常接近球形的物体,并且其表面已知足够的精度水平,可以从测量结果确定仪器的点扩展功能。 我们得出结论,在该计算中使用的近似不提供足够的精度以允许实现这一点,并且从围绕物体周围的闭合表面截断表面功能的截断,以便为其提供独特的解决方案 问题。 这种方式截断表面的物理理由也是质疑的。

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  • 来源
    《Applied optics》 |2017年第10期|共8页
  • 作者

    Henning A. J.; Giusca C. L.;

  • 作者单位

    Natl Phys Lab Teddington TW11 0LW Middx England;

    Cranfield Univ Cranfield MK43 0AL Beds England;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用;
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