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机译:用于亚毫米硅光学器件的深反应离子蚀刻抗反射涂层
Cornell Univ Dept Phys 109 Clark Hall Ithaca NY 14853 USA;
Cornell Univ Dept Phys 109 Clark Hall Ithaca NY 14853 USA;
Cornell Univ Kavli Inst Cornell Nanoscale Sci Ithaca NY 14853 USA;
Cornell Univ Dept Phys 109 Clark Hall Ithaca NY 14853 USA;
Cornell Univ Dept Astron 220 Space Sci Bldg Ithaca NY 14853 USA;
Cornell Univ Dept Phys 109 Clark Hall Ithaca NY 14853 USA;
Goddard Space Flight Ctr Greenbelt MD 20771 USA;
Cornell Univ Dept Phys 109 Clark Hall Ithaca NY 14853 USA;
Cornell Univ Dept Phys 109 Clark Hall Ithaca NY 14853 USA;
Cornell Univ Dept Astron 220 Space Sci Bldg Ithaca NY 14853 USA;
Goddard Space Flight Ctr Greenbelt MD 20771 USA;