...
机译:等离子体聚合沉积的SiOxcy薄膜的不同应力
Natl Cent Univ Dept Opt &
Photon Thin Film Technol Ctr Chungli Taiwan;
Natl Cent Univ Dept Opt &
Photon Thin Film Technol Ctr Chungli Taiwan;
Minghsin Univ Sci &
Technol Dept Optoelect Syst Engn Hsinchu Taiwan;
Natl Cent Univ Dept Opt &
Photon Thin Film Technol Ctr Chungli Taiwan;
Natl Cent Univ Dept Opt &
Photon Thin Film Technol Ctr Chungli Taiwan;
Natl Cent Univ Dept Opt &
Photon Thin Film Technol Ctr Chungli Taiwan;
Natl Cent Univ Dept Opt &
Photon Thin Film Technol Ctr Chungli Taiwan;