This work shrinks down the size of Ge-on-Si photodetectors to reduce the dark current and maintain the optical responsivity by surrounding photonic crystals. Numerical simulation shows that the employment of photonic crystal in the Si slab effectively prohibits the radiation modes from those guided outgoing waves and facilitates light cyclic absorption in the epitaxial Ge region. A photodetector with a 5 mu m long Ge absorption region is demonstrated with a dark current of 150 nA (1 mu A up to 70 degrees C), a 3 dB bandwidth of 17 GHz, and a responsivity of 0.75 A/W. (C) 2018 Optical Society of America
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机译:这项工作缩小了Ge-on-Si光电探测器的尺寸,以减少暗电流并通过周围的光子晶体保持光学响应性。 数值模拟表明,Si板中的光子晶体的就业有效地禁止来自那些引导的输出波的辐射模式,并促进外延Ge区域中的光循环吸收。 具有5μm长ge吸收区域的光电探测器,暗电流为150 na(1μm,高达70℃),3db带宽为17 ghz,响应性为0.75 a / w。 (c)2018年光学学会
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