Wavelength-by-wavelength Kramers-Kronig consistent inversion of ellipsometry data

摘要

The wavelength-by-wavelength (point-by-point) inversion process consists of solving the ellipsometric equations for each wavelength of the considered spectrum regardless of the other points. It provides the refractive index (n) and extinction coefficient (k) of an unknown absorbing material inside a multilayer stack from ellipsometry measurements. A revision of the wavelength-by-wavelength n/k extraction is presented to overcome its two main deficiencies, which are (i) multiple solution possibilities and (ii) lack ofKramers-Kronig consistency. In addition, from a given estimate of thickness value, the inversion process allows one to determine it more exactly. (C) 2019 Optical Society of America.