Application of three-dimensional confocal x-ray fluorescence equipment in surface topography and depth contour scanning

摘要

Three-dimensional microfocus x-ray fluorescence technology has been used to determine surface topography. The surface scanning technique initially facilitated surface topography reconstruction of the sample. This paper demonstrates the improved performance of its infrastructure, including a higher-precision translation platform, an ultrabright microfocus x-ray source and a rewritten scanning algorithm, leading to a new scanning technology that can depict the surface topography of samples with complex internal structures. The improved scanning technology can analyze the metal element information of layers at different depths. This paper presents studies of the surface and depth of coins and porcelain bottles from ancient times using this technique. (C) 2019 Optical Society of America