In this work we present the theoretical background and experimental procedure to measure the thickness of thin films by analyzing Fresnel diffraction patterns obtained from polychromatic illumination of phase-step samples. As examples of this technique, we measured the thicknesses of thin aluminum layers on glass substrates using three different broad-spectrum light sources. The results are in excellent agreement with independent interferometric measurements within less than 5% relative uncertainties. (C) 2016 Optical Society of America
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