Estimation of parameters for evaluating subsurface microcracks in glass with in-line digital holographic microscopy

摘要

In this work, a new method for imaging subsurface damage (SSD) is proposed, which is, to the best of our knowledge, the first application of the in-line digital holographic microscopy (IDHM) to the reconstruction of the subsurface damage in glass. By combination of the in-line arrangement and an objective lens to image the hologram on the CCD surface, the method is characterized by its high resolution in both the lateral and depth directions. Then the three-dimensional reconstruction of the microcracks within the glass was realized by numerically focusing en-face images at different depths, and the sizes of SSD along the transversal and depth directions were estimated. Based on the experimental results, the cracks can be divided into two categories: one is that the cracks begin from the surface of optical elements, the other is totally within the components. To indicate the propagation or development trajectory of the cracks and predict the magnitude of the laser-induced damage threshold, the relative intensity distributions of the light scattered by the cracks compared with the ones without cracks were also reconstructed. In this case all the required parameters for evaluating SSD are obtained with our IDHM system, so that the SSD produced in the manufacturing process can be reduced or removed more easily to optimize the performance of the optical component and extend its lifetime. These results provide the guidance for the optical system design of precision measurements. (C) 2015 Optical Society of America