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机译:经由严格仿真和后传播神经网络分析和调制极端紫外光刻投影仪中的像差
Chinese Acad Sci Inst Microelect Integrated Circuit Adv Proc Ctr Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Integrated Circuit Adv Proc Ctr Beijing 100029 Peoples R China;
Shandong Univ Sch Microelect Jinan 250100 Shandong Peoples R China;
Chinese Acad Sci Inst Microelect Integrated Circuit Adv Proc Ctr Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Integrated Circuit Adv Proc Ctr Beijing 100029 Peoples R China;