Single-shot multispectral angle-resolved ellipsometry

摘要

We describe an instantaneous measurement scheme of multispectral angle-resolved ellipsometry with a color camera. A back focal plane image captured by the color camera enables us to simultaneously measure various polarization states along incidence angles and a multispectral domain. Modified parameters based on the principle of micro-ellipsometry are derived for an adequate form in a red, green and blue (RGB) domain by considering the wideband multispectral acquisition. The proposed method is validated by the measurement of uniformly deposited films and comparing our results with a commercial ellipsometer. The comparison shows that our proposed method enables real-time inspection with high precision. (C) 2020 Optical Society of America