Liquid infiltration of monolithic open-access Fabry-Perot microcavities

摘要

We describe a monolithic approach to fabricating large-scale arrays of high-finesse and low-mode-volume FabryPerot microcavities with open access to the air core. A stress-driven buckling self-assembly technique was used to formhalf-symmetric curved-mirror cavities, and a dry etching process was subsequently used to create micropores through the upper mirror. We show that the cavities retain excellent optical properties, with reflectance-limited finesse similar to 2500 and highly predictable Laguerre-Gaussian modes. We furthermore demonstrate the ability to introduce liquids into the cavity region by microinjection through the pores. Applications in sensing, optofluidics, and cavity quantum electrodynamics are envisioned. (C) 2020 Optical Society of America.