Optomechanical inertial sensors

摘要

We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of 1 x 10(-11) m/s(2) root Hz. Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating mQ-products at levels of 250 kg, which highlight their exquisite acceleration sensitivity. (C)2020 Optical Society of America.